| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
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Physical Vapor Deposition (PVD) System Magnetron Sputtering Machine For Sale
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About Sputtering
Sputtering is performed in a vacuum chamber where the substrate is mounted on a plate that is negatively charged and the source is released by impinging high-energy noble gas atoms, commonly Argon, provided by a high voltage dc or rf glow discharge. The high-energy impact of the ions induces atoms at the surface of the substrate to be ejected or sputtered. These sputtered atoms form a thin film coating after condensing.
The equipment is a reasonable structure, coating evenly into good-quality, pumping speed, the cycle of short, high efficiency and easy operation, low energy consumption and performance advantages of stability. Widely used in automotive, audio and various small appliances, computers, clocks and watches, toys, cell phones, reflective Cup, cosmetics, toys and other industries.
Features:
Vertical or Horizontal Design
DC high deposition rate magnetron cathodes
Automatic shutters
Substrate DC bias
Turbomolecular or cryogenic pumping system(optional)
New generation control and software management. PLC with touch screen
Process gas lines with MFC
Low maintenance costs. Low service costs.
Easy upgrade
Applications:
Reactive and multi-cathode co-sputtering processes
Single or multi-layers deposition
Metallic and dielectric coatings for microelectronics and photonics
Optical, tribological, protective and decorative coatings
Magnetic films, sensors, actuators
EM shields and anti-static coatings for PC and telephones
Arospace, automotive, defence
Energy and environment (catalysis, solar and fuel cells)
Magnetic films
Safety and health
DC magnetron sputtering coating machine is usually used for direct sputtering coating for different substrates, such as kinds of plastic, glass, metal, ceramic, etc.
We have dedicated more than 10 years to manufacturing and designing magnetrons that can be rectangular, cylindrical, circular, and of various sizes. They have developed a plethora of targets that can be directly cooled or bonded, and can be manufactured in such a way that can fit most magnetron sizes.
Magnetic fields can essentially define the behaviour and the properties of the ion charged particles that are used for sputtering. The development and commercialisation of software that can enable the distinct modelling of magnetron sputtering is bound to enhance its productivity, applicability, and reproducibility.
| Technical Spcifications |
| Model Number | SP-1000 | SP-1200 | SP-1400 | SP-1800 |
| Dimension of vacuum chamber | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 |
| (diameter*height) | ||||
| Material of vacuum chamber | Carbon steel, SUS304 or SUS316L | |||
| Quantity of sputtering cathodes | ≥1 sets, DC sputtering system, cylindrical or rectangle sputtering cathodes | |||
| Pumping system | Turbo molecular pumps or diffusion pump+mechanical pump | |||
| Pumping Time | From atmosphere to 5.0*10-2Pa less than 8 minutes | |||
| Gas distribution System with Mass Flow Controllers | ≥2 sets | |||
| Ultimate Vacuum | 5.0*10-4 Pa | |||
| Working temperature | Room temperature | |||
| Working mode | Automatic or Manual mode, by 10.4(or 15) inches PLC touches screen | |||
| Total Power | 40-100kW | 70-1000kW | ||
| These units you can custom made | 1. Size of vacuum chamber | |||
| 2. Quantity of sputtering cathodes | ||||
| 3. Configurations of pumps | ||||
| 4. Gas distribution system | ||||
| Optional instruments | 1. Coatings thickness monitor | |||
| 2. Leakage detector | ||||
| 3. Arc ion deposition system(not for continuous model) | ||||
| 4. Evaporation system(not for continuous model): | ||||
PS: All the specifications can be customized according to your requests.
Inquiry Guide:
The PVD coating machine can be used for different materials and industries. In order to recommend you the appropriate machine, we need your help on telling us:
What is the material of your product?
What is you maximum part size?
What is the size of your parts most in common?
What is the desired quantity of parts to be coated daily?
What are your desired coatings or coating colors?
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