| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
Suppliers with verified business licenses
Audited by an independent third-party inspection agency
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Mode
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ARC series
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Vacuum Chamber
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SUS304. φBDDmm-1200×800-1200mm(H
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Substrate Dome Size
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Depends on thecustomers needs
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Substrate Dome Rotation Speed
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10 rpm to 50 rpm(Variable)
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ArcEvaporation Source
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From 2 to 16 sets
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VacuumSystem
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Roughing Pump,Diffusion Pumpsor Turbo Molecular Pump +Mechanical pumps
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Ultimate Pressure
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50×10-4Pa or lower
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Pump Down Rate
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25 minutes IAtm.to 50×10-3 pa)
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Substrate Heater
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550(max)
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Layout Dimensions
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5000mm 0W)×6500mm(D)×3500mm(H)approx
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Power Requirements
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3-phase,380V,50/60Hz,100-180kVA apprOx
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Cooling Water Flow Rate
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140/min.or greater
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Compressed Air Pressure
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0.5MPa orhigher
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Gross Weight
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8500kg approx
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