| Customization: | Available |
|---|---|
| Certification: | CE |
| Processing Speed: | 1-5 m/min |
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Magnetron Sputtering Automatic Coating ITO Glass Making Equipment
Structure of the magnetron sputtering coating line
The vacuum coating production line is usually connected by more than three vacuum chambers to form a continuous working vacuum coating machine.
The vacuum coating line is mainly used for film coating on flat glass, acrylic, PC, PET substrates, various metal films, dielectric films, dielectric metal composite films, transparent conductive films and other film applications.
The industries involved in the vacuum coating line include the surface coating of plastic panels and display screens in mobile phones, electronics, home appliances and other industries.
The vacuum coating production line adopts molecular pump or diffusion pump to form advanced design with atmosphere isolation. The equipment uses turbo floating molecular pump to obtain high efficiency isolation, stable pumping speed and uniform gas distribution. In the case of pumping with a diffusion pump, the vacuum pumping rate is high and the equipment production cost is lower.
Vertical magnetron sputtering coating line
A normally complete continuous magnetron sputtering production line has a total of fifteen vacuum chambers, one for the chamber, one for the unload chamber, one for the buffer chamber, one for the unload buffer, one for the transfer chamber, and one for the unload chamber. Two transfer chambers; seven sputter coating chambers; four sputtering chambers can be installed at the same time in each sputter coating chamber; the high vacuum chamber is separated by a plug-in valve, and multi-function coating can be achieved by changing the atmosphere isolation effect; substrate rack operation The track uses a magnetic guided drive; the device is equipped with a turbo-buoy molecular pump and a mechanical pump for stable pumping speed and uniform gas distribution.
Horizontal magnetron sputtering coating line
The company can provide design according to user requirements, provide a full set of equipment, responsible for the process, according to "turnkey" engineering services.
Magnetron sputtering cathodes
Accorinf to different technical requirements of each customers, we can design different types of magnetron sputtering cathodes for the machine. This is the coating system of the machine. You can load different raw material to the cathodes for different coatings.
Technical Spcifications
| Chamber type | Vertical and horizontal method of multi-chamber | |
| Applied material | Glass and Wafer, other plastic, metal materials | |
| Substrate size | Vertical type | 2,200mm x 2,500mm |
| Horizontal type | 1,500mm x 1,800mm | |
| Tact time | 60 sec or less (Static method) 35 sec or less (Dynamic method) | |
| Coating source | Sputter source | Rotary cathode, Planar cathode |
| Thermal source | Crucible, E-beam | |
| Coating material | Metal material | Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material |
| Reactive material | TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide material | |
| Power supply | DC, Pulse DC, MF | |
| Thickness uniformity | ±10% or less (Static film) ±5% or less (Moving film) | |
| Measuring instrument | Sheet resistance, optic (Transmittance, reflectance, color-difference meter), | |
| plasma emission monitor, RGA | ||
| Household appliances field | Decorative coating on household products and exterior of mobile devices | |
| Energy field | Architectural window glass, solar cell | |
| Other industrial field | Metal thin film and oxide thin film, multi-layered thin film coating based application field | |
In order to help you choose the best suitable PVD coating machine, please try to reply my questions below, thanks for your cooperation.
Q1: What is your product, and the max. dimension?
Q2: The size of your processing material, your desired daily production capacity?
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