| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
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Vacuum Degree Sensors Ionization Gauge For PVD Coating Machine
General Description:
The vacuum ionization gauge is a typical triode structure. It uses a noble metal oxide cathode. It has anti-oxidation and transient atmospheric impact resistance. It has stable performance and long life. It is suitable for medium and high vacuum measurement.
Applications:
Process control in high vacuum processes such photovoltaic production, FPD, semiconductor, optic and electronic parts manufacturing systems
Ultimate pressure measurement in high vacuum manufacturing systems
Pressure measurement in high and ultra high vacuum equipment
Technical Parameters:
1. Measurement range: 4×101 ~ 1×10-5 Pa.
2. X-ray limit: less than 1×10-6 Pa
3. Regulatory sensitivity: 0.15±15%Pa-1
4. Working parameters:
Accelerated pole to ground potential: 225V
Cathode to ground potential: 25V
Collect pole to ground potential: 0V
Emission current: 100uA (1 × 101 ~ 1 × 10-1 Pa)
1mA (1×10-1 to 1×10-5 Pa)
5. In the range of 101 to 100 Pa, 2×10-5 Pa to 1×10-5 Pa, only for reference measurement.
6. Vacuum connection form and baking temperature:
Φ15.5±0.5 glass 80°C
Φ15.5±0.1 metal 80°C
KF10 quick release flange 80°C
KF16 quick release flange 80°C
KF25 quick release flange 80°C
KF40 quick release flange 80°C
CF16 super high flange 450°C
CF25 super high flange 450°C
CF35 super high flange 450°C
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