| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
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Medium Frequency(MF)Sputtering Power Supply For PVD System
MF sputtering coating system:
General description:
The MF power supply has a wide output power (60Kw~200Kw), output frequency (20KHz~60KHz), and accurate current power output.
This power supply has a wide range of applications for processes that require high output power (eg, architectural glass coating, ultra-thick film, etc.). With advanced arc detection circuit, extremely low arc residual energy.
The power supply is applied to metal or semiconductor materials through double cathode sputtering, and it is particularly suitable for reactive magnetron sputtering, oxide nitride carbide film layer, which can increase the ionization rate.
Features of this MF sputtering power supply:
1: Its main loop topology adopts PFC+ full bridge architecture combined with ARM+DSP digital control technology
2: It can switch between constant power / constant current / constant voltage mode. Constant power mode ensures repeatability of the coating process
3: Its built-in arc extinguishing time setting ranges 10us-100us, it can be adapted to different processes and targets, it records and counts arcs.
4: It can simultaneously detect V-ARC & I-ARC, which allows the output to be cut off quickly and simultaneously activates the built-in patented technology for eliminating residual arc energy, thus it can avoid arcing of the cathode and substrates, and guaranteeing you can obtain high precision coatings.
5: It has an extremely wide load matching capability. Its output voltage ranges 350-1000V, and its maximum current is 128A.
6: It is a first-class reliable design. We have more than 500 MF power sources running in different coating machines at this moment. It can be used in the LOEW glass production line and stabilized at 24H.
7: Its modular design is constructed in N+1 form, which supports multi-machine parallel power up to 120KW
8: Its independent main control system adopts intelligent current sharing technology to ensure the same power output per module in parallel. Frequency effectively improves the reliability of the power system.
9: Its operation can be controlled by panel, and the analog quantity is controlled by remote PLC. It supports PROFIBUS communication.
Focus on manufacuring PVD coating machine in the last 10 years, our machines have been sold to more than 10 countries all over the world.
When you use Hondson VAC machines for your PVD coating needs, you receive:
Customized Equipment
All of our coating equipment is built and customized for a particular client instead of relying upon mass-production assembly lines.
Cutting-Edge Products
Our strong R&D team and partnership with professional research institutions give Hondson VAC access to new advances in PVD coating technology.
Quality Tech Support
Our software allows us to remotely diagnose any technical or operating problems encountered by you and then quickly solve those problems.
Reliable Hardware and Processing Software
For more than 10 years, we've devoted ourselves to refining the construction of quality hardware components and processing software with effective system integration.
User-Friendly Equipments
Our PVD coating equipment is easy to operate with a high-level of automation and one-touch panels.
Great Prices
We keep production costs down by increasing automation and partnering with other business alliances.
| After-sales service |
We guarantee the quality of the main parts within 12 months. If the main parts go wrong without mis-operation within one year, we will freely provide them or maintain them for you. After one year, if you need to change parts, we will kindly provide you with the best price or maintain it in your site. Whenever you have technical question in using it, we will freely do our best to support you.
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1. Outside package: Standard marine export plywood case.
2. Inner package: Stretchy film and plastic film for humidity.
3. We can package according to your requests.
After the customer tested the machine and make sure the machine is no problem, we will take the machine apart. When the machine is shipped, it is in un-assemble condition. The packing is made up of steel, polywood sheet and thin fim, as well as pallet. The solid packing can make sure you will receive a machine without any destroy.
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