| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
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Magnetron Sputtering Glass Vacuum Coating Machine For Mirror Making
[We provide technical consulting service and modification solution for old machines]
Structure: the use of high efficiency horizontal continuous magnetron coating line, with the front and rear rough pumping chamber, and after the transition chamber, before and after the fine pumping chamber, a buffer chamber, color plating room.
Target design: cylindricalcathode target and plane cathode target.
Power allocation: power supply with high power RF magnetron sputtering
Drive system: roller drive, frequency adjustable, induction type room door opening system.
Vacuum system: diffusion pump (pump) + roots pump mechanical pump
Optional: cryogenic pump
Can be coated glass, size can be customized
The production line is used the advanced valves among these chambers, it can achieve effective partition, stable process gas.
The production line is designed with uniform inlet and air inlet, and the air flow is evenly and gently;
Electrical control: production line using PLC full process control, rapid production of the beat, with industrial computer display system.
Man machine dialogue: the control system can realize the human and the machine dialogue, in time for the production process necessary intervention. The operation process of the warning and fault display, fault display can prompt the operator to correct operation and troubleshooting.
Other technical parameters:
Limit vacuum: 3 x 10-2Pa
Water flow rate is greater than or equal to 0.2Mpa 3m3/h; the water temperature is less than 25C; air pressure: 0.4-0.8Mpa.
Structure of the magnetron sputtering coating line
The vacuum coating production line is usually connected by more than three vacuum chambers to form a continuous working vacuum coating machine.
The vacuum coating line is mainly used for film coating on flat glass, acrylic, PC, PET substrates, various metal films, dielectric films, dielectric metal composite films, transparent conductive films and other film applications.
The industries involved in the vacuum coating line include the surface coating of plastic panels and display screens in mobile phones, electronics, home appliances and other industries.
The vacuum coating production line adopts molecular pump or diffusion pump to form advanced design with atmosphere isolation. The equipment uses turbo floating molecular pump to obtain high efficiency isolation, stable pumping speed and uniform gas distribution. In the case of pumping with a diffusion pump, the vacuum pumping rate is high and the equipment production cost is lower.
Vertical magnetron sputtering coating line
Horizontal magnetron sputtering coating line
The company can provide design according to user requirements, provide a full set of equipment, responsible for the process, according to "turnkey" engineering services.
Magnetron sputtering cathodes
Accorinf to different technical requirements of each customers, we can design different types of magnetron sputtering cathodes for the machine. This is the coating system of the machine. You can load different raw material to the cathodes for different coatings.
Technical Spcifications
| Chamber type | Vertical and horizontal method of multi-chamber | |
| Applied material | Glass and Wafer, other plastic, metal materials | |
| Substrate size | Vertical type | 2,200mm x 2,500mm |
| Horizontal type | 1,500mm x 1,800mm | |
| Tact time | 60 sec or less (Static method) 35 sec or less (Dynamic method) | |
| Coating source | Sputter source | Rotary cathode, Planar cathode |
| Thermal source | Crucible, E-beam | |
| Coating material | Metal material | Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material |
| Reactive material | TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide material | |
| Power supply | DC, Pulse DC, MF | |
| Thickness uniformity | ±10% or less (Static film) ±5% or less (Moving film) | |
| Measuring instrument | Sheet resistance, optic (Transmittance, reflectance, color-difference meter), | |
| plasma emission monitor, RGA | ||
| Household appliances field | Decorative coating on household products and exterior of mobile devices | |
| Energy field | Architectural window glass, solar cell | |
| Other industrial field | Metal thin film and oxide thin film, multi-layered thin film coating based application field | |
Inquiry Guide:
The PVD coating machine can be used for different materials and industries. In order to recommend you the appropriate machine, we need your help on telling us:
What is the material of your product?
What is you maximum part size?
What is the size of your parts most in common?
What is the desired quantity of parts to be coated daily?
What are your desired coatings or coating colors?
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