| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
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MF Unbalanced Magnetron Sputtering Sources
This sputtering coating unit can be used for PVD sputtering system.
Main Features:
Easy to install design.
High strength rare earth magnet module
Compatibility with DC, pulsed DC, MF operation.
High sputtering rate coupled with excellent target utilization
The sputtering material can be different metals, and silcon
Integrated argon gas inlet assembly.
Optimized turbulent water flow to provide uniform target cooling.
Low operating pressures.
Flexibility to accept target in 'clamp on' or 'bonded' configuration to cover broad range of thicknesses down to foils.
External or internal mounting optional.
UBM option available in all categories.
UHV compatible sources are also available
Integrated shutter assembly.
| Medium Frequency(MF) Twin Cathodes Magnetron Sputtering |
Unbalanced magnetron sputtering can be come with a cylindrical and planar target. The deposition power efficiency twice as large as that obtained by conventional magnetron sputtering was realized.
| How the sputtering system works |
This technology can be usually used for applying decorative colors onto metal, ceramic and glass items.
| General Process |
· Ar gas which is activated in plasma forms Ar ions.
· The Ar ions sputter out metal atoms from the target.
· Unbalanced magnetic field introduces the Ar ions around the substrate.
· Apply negative voltage on the substrate to attract Ar ions that induce active energy to the metal atoms depositing on the substrate.
· Solid metal films are formed on the substrate.
| Techanical Specifications |
| Model Number | SP-1000 | SP-1200 | SP-1400 | SP-1800 |
| Dimension of vacuum chamber | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 |
| (diameter*height) | ||||
| Material of vacuum chamber | Carbon steel, SUS304 or SUS316L | |||
| Quantity of sputtering cathodes | ≥1 sets,MF(medium frequency) unbalanced sputtering system, or rectangle or cylindrical sputtering cathodes | |||
| Pumping system | Turbo molecular pumps or diffusion pump+mechanical pump | |||
| Pumping Time | From atmosphere to 5.0*10-2Pa less than 8 minutes | |||
| Gas distribution System with Mass Flow Controllers | ≥2 sets | |||
| Ultimate Vacuum | 5.0*10-4 Pa | |||
| Working temperature | Room temperature | |||
| Working mode | Automatic or Manual mode, by 10.4(or 15) inches PLC touches screen | |||
| Total Power | 40-100kW | 70-1000kW | ||
| These units you can custom made | 1. Size of vacuum chamber | |||
| 2. Quantity of sputtering cathodes | ||||
| 3. Configurations of pumps | ||||
| 4. Gas distribution system | ||||
| Optional instruments | 1. Coatings thickness monitor | |||
| 2. Leakage detector | ||||
| 3. Arc ion deposition system(not for continuous model) | ||||
| 4. Evaporation system(not for continuous model) | ||||
PS: All the specifications can be customized according to your requests.
| Different colors made by MF magnetron sputtering |
Xiangtan Hondson Coating Technology Co., Ltd. has enjoyed conspicuous success in the design, manufacture of PVD Vacuum Coating Machines. We are specialized in innovative PVD technology, as well as equipment for various applications, including electronics, thin film deposition, vacuum coated glass, automotive, plastic decorations, harden protective coatings on tools, molds, drills, knives, etc. Our high quality Vacuum Coaters are sold to foreign and domestic markets and win their praise and good graces. We are happy to establish business relationship with customers all over the world. If you are interested in our products, or you are looking for cooperation partners in China for Vacuum Coating Equipment, welcome to contact us for further information. Every machine is designed according to customer's real requests.
1. The inner packing is protective plastic film to protect the PVD machine from moisture and rain.
2. The out packing is plywood plate with steel to keep the PVD machine in good condition during the long distance transportation.
After the customer tested the PVD coating machine and make sure the machine is no problem, we will take the machine apart. The solid packing can make sure you will receive a machine without any destroy.
For more details, please contact us.
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