Customization: | Available |
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After-sales Service: | Engineers Can Be Sent to The Worksite |
Warranty: | 1 Year |
Suppliers with verified business licenses
Audited by an independent third-party inspection agency
Model Number
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ARC-600
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ARC-1000
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ARC-1200
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Dimension ofvacuum chamber(diameterheight)
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600*700mm
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1000*1100
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1000*1200
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Material of vacuum chamber
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SUS304 or SUS316L with coolingjacket
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Quantity ofarcsources
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1-4 sets
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8-12 sets
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10-14 sets
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Pumping system
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Molecular pumpor diffusion pump+mechanical pumps
+booster pump
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Pumping Time
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From atmosphere to 5.0*10-2Pa less than 8 minutes
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Bias Power Supply
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10kW
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20kW
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20kW
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Gas distribution System with MassFlow
Controllers |
23 sets
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Vacuum Limit
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5.0*10-4 Pa
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Working temperature
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Upto 550centigrades
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Workingmode
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Automatic or Manual mode,by10.4 inches PLC
touchesscreen
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Total Power
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40-120kW
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40-120kW
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70-180kW
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Footprint
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2*2 meters
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3*3 meters
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3*3 meters
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These units you can custom made
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1.Size of vacuum chamber
2.Quantity ofarc sources 3.Configurationsof pumps 4.Gas distribution system |
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Optional instruments
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1.Coatings thickness monitor
2.Leakage detector 3.Magnetronsputtering system 4.Evaporation system 5.Polycold |
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