Customization: | Available |
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After-sales Service: | Engineers Can Be Sent to The Worksite |
Warranty: | 1 Year |
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Vacuum Plating Vapor Deposition Equipment PVD Coating Machines
Model Number | SP-600 | SP-900 | SP-1000 | SP-1200 | SP-1400 | SP-1800 | SP-8000 |
Dimension of vacuum chamber(diameter*height) | 600*700mm | 900*1000 | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 | Continuous line |
Material of vacuum chamber | Carbon steel, SUS304 or SUS316L | ||||||
Quantity of sputtering cathodes | ≥1 sets, DC or MF(medium frequency), or rectangle sputtering cathodes | ||||||
Pumping system | molecular pump or diffusion pump+mechanical pump | molecular pump or diffusion pump+mechanical pumps, booster pump | |||||
Pumping Time | From atmosphere to 5.0*10-2Pa less than 8 minutes | ||||||
Gas distribution System with Mass Flow Controllers | ≥2 sets | ||||||
Vacuum Limit | 5.0*10-4 Pa | ||||||
Working temperature | Room temperature As requested( for for continuous model) |
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Working mode | Automatic or Manual mode, by 10.4 inches PLC touches screen | ||||||
Total Power | 40-100kW | 70-1000kW | |||||
Footprint | 2*2 meters | 2*3 meters | 3*3 meters | 3*3 meters | 3*4 meters | 4*5 meters | Depends on needs |
These units you can custom made | 1. Size of vacuum chamber 2. Quantity of sputtering cathodes 3. Configurations of pumps 4. Gas distribution system |
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Optional instruments | 1. Coatings thickness monitor 2. Leakage detector 3. Arc ion deposition system(not for continuous model) 4. Evaporation system(not for continuous model) |