Hybrid Systems for Cathode-Arc and Magnetron Sputtering Hipims/Dcms

• After-sales Service: Engineers Can Be Sent to The Worksite
• Warranty: 1 Year
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: ARC-800
• Condition: New
• Weight (Kg): 5800
• Dimension(L*W*H): Customized Size
• Warranty of Core Components: 1 Year
• Dimensions of Vacuum Chamber: Can Be Designed Following Customer′s Requirements
• Voltage: Customers Local Voltage
• Machinery Test Report: Provided
• Coating Method: Arc Deposition+Magnetron Sputtering
• Equipment Name: Titanium Aluminum Chromium Nitride Coating Machine
• Machine Type: Coating Equipment
• Video Outgoing-Inspection: Provided
• Cathodic Arc Target: Diameter 100X40(mm) and It Also Can Be Customized.
• Applicable Industries: Manufacturing Plant
• After Warranty Service: Video Technical Support
• Transport Package: Standard Export Packing
• Specification: Customized
• Trademark: Hondson VAC
• Origin: Hunan, China
• HS Code: 8543300090
• Production Capacity: 50 Sets/Year

Product Description

Hybrid Systems For Cathode-Arc And Magnetron Sputtering HiPIMS/DCMS

[We provide technical consulting service and modification solution for old machines]

 

Arc & Sputter system

 

 

WORKING PRINCIPLE:

 

 

 

Technical Spcifications

Mode	SA-800	SA-1000	SA-1200	SA-1600
Dimension	D700*H800mm	D1000*H1100mm	D1200*H1400mm	D1600*H2000m
Arc source quantity	6 pcs	12pcs	14pcs	24pcs
Sputtering	DC or MF sputtering
Sputtering	≥1 set
Arc Power source	Arc power source, Pulsed bias power supply
Reactive gas control	Mass flowmeter + Electromagnetic valve
Vacuum chamber structure	Vertical chamber front opening door, double layer cooling chamber, SUS304
Pumping system	Diffusion pump(Turbo Molecular pumps) +Roots pump +Mechanical pump
	the ultimate vacuum can reach up to (5.0*10-4Pa)
Heating Temperature control	Normal temperature to 150~500 centigrade PID control, radiation heating.
Vacuum degree measuring	Digital display composite vacuum gauge: from atmosphere to 1.0*10-5Pa
Control mode	Manual/Automatic work mode by PLC touched screen
Compressed Air	5 ~ 8Kgf/cm2
Cooling Water	2.5 ~ 3Kgf/cm2, 18 ~ 25°C, Distilled Water
Process Gas	99.999% Pure Gas
Heating Control	Selecting the capacity according to the choice of user, PID control
System Ground	Class-1 grounding or its relevant facility
Remarks	All the specifications can be customized according to your requests.

 

Company Information

 

 

 

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Inquiry Guide:

The PVD coating machine can be used for different materials and industries. In order to recommend you the appropriate machine, we need your help on telling us:

What is the material of your product?

What is you maximum part size?

What is the size of your parts most in common?

What is the desired quantity of parts to be coated daily?

What are your desired coatings or coating colors?