Hybrid Systems for Cathode-Arc and Magnetron Sputtering Hipims/Dcms

• Customization: Available
• After-sales Service: Engineers Can Be Sent to The Worksite
• Warranty: 1 Year
• Model NO.: ARC-800
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Condition: New
• Weight (Kg): 5800
• Dimension(L*W*H): Customized Size
• Warranty of Core Components: 1 Year
• Dimensions of Vacuum Chamber: Can Be Designed Following Customer′s Requirements
• Voltage: Customers Local Voltage
• Machinery Test Report: Provided
• Coating Method: Arc Deposition+Magnetron Sputtering
• Equipment Name: Titanium Aluminum Chromium Nitride Coating Machine
• Machine Type: Coating Equipment
• Video Outgoing-Inspection: Provided
• Cathodic Arc Target: Diameter 100X40(mm) and It Also Can Be Customized.
• Applicable Industries: Manufacturing Plant
• After Warranty Service: Video Technical Support
• Transport Package: Standard Export Packing
• Specification: Customized
• Trademark: Hondson VAC
• Origin: Hunan, China
• HS Code: 8543300090
• Production Capacity: 50 Sets/Year

Product Description

Hybrid Systems For Cathode-Arc And Magnetron Sputtering HiPIMS/DCMS

[We provide technical consulting service and modification solution for old machines]

 

Arc & Sputter system

 

 

WORKING PRINCIPLE:

 

 

 

Technical Spcifications

Mode	SA-800	SA-1000	SA-1200	SA-1600
Dimension	D700*H800mm	D1000*H1100mm	D1200*H1400mm	D1600*H2000m
Arc source quantity	6 pcs	12pcs	14pcs	24pcs
Sputtering	DC or MF sputtering
Sputtering	≥1 set
Arc Power source	Arc power source, Pulsed bias power supply
Reactive gas control	Mass flowmeter + Electromagnetic valve
Vacuum chamber structure	Vertical chamber front opening door, double layer cooling chamber, SUS304
Pumping system	Diffusion pump(Turbo Molecular pumps) +Roots pump +Mechanical pump
	the ultimate vacuum can reach up to (5.0*10-4Pa)
Heating Temperature control	Normal temperature to 150~500 centigrade PID control, radiation heating.
Vacuum degree measuring	Digital display composite vacuum gauge: from atmosphere to 1.0*10-5Pa
Control mode	Manual/Automatic work mode by PLC touched screen
Compressed Air	5 ~ 8Kgf/cm2
Cooling Water	2.5 ~ 3Kgf/cm2, 18 ~ 25°C, Distilled Water
Process Gas	99.999% Pure Gas
Heating Control	Selecting the capacity according to the choice of user, PID control
System Ground	Class-1 grounding or its relevant facility
Remarks	All the specifications can be customized according to your requests.

 

Company Information

 

 

 

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Inquiry Guide:

The PVD coating machine can be used for different materials and industries. In order to recommend you the appropriate machine, we need your help on telling us:

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What is the size of your parts most in common?

What is the desired quantity of parts to be coated daily?

What are your desired coatings or coating colors?