| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
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Plasma Coating Machine Magnetron Sputtering System
The equipment is a reasonable structure, coating evenly into good-quality, pumping speed, the cycle of short, high efficiency and easy operation, low energy consumption and performance advantages of stability.
Magnetron Sputtering Coating System is an advanced technology equipment commonly used for material surface modification and thin film preparation. It utilizes the principle of magnetron sputtering to convert the target material into an ionic state and deposit it on the substrate surface in a vacuum environment, forming a uniform and dense thin film.
Magnetron sputtering coating instrument consists of a sputtering chamber, vacuum system, magnetron system, substrate frame, target material, etc. Among them, the sputtering chamber is the core component for thin film formation, which is equipped with a target material and a substrate frame inside. By controlling the distance and angle between the target material and the substrate, different thin film deposition methods can be achieved. The specific working principle is to convert the material on the surface of the target material into an ionic state through heating or arc excitation in a vacuum environment, and then guide the ions to the substrate surface through magnetic field control on the target material. The thin film formed on the substrate surface has the advantages of high purity, good density, and strong adhesion, and can be widely used in many fields.
| Medium Frequency(MF) Twin Cathodes Magnetron Sputtering |
Unbalanced magnetron sputtering can be come with a cylindrical and planar target. The deposition power efficiency twice as large as that obtained by conventional magnetron sputtering was realized.
| How the sputtering system works |
This technology can be usually used for applying decorative colors onto metal, ceramic and glass items.
| General Process |
· Ar gas which is activated in plasma forms Ar ions.
· The Ar ions sputter out metal atoms from the target.
· Unbalanced magnetic field introduces the Ar ions around the substrate.
· Apply negative voltage on the substrate to attract Ar ions that induce active energy to the metal atoms depositing on the substrate.
· Solid metal films are formed on the substrate.
| Techanical Specifications |
| Model Number | SP-1000 | SP-1200 | SP-1400 | SP-1800 |
| Dimension of vacuum chamber | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 |
| (diameter*height) | ||||
| Material of vacuum chamber | Carbon steel, SUS304 or SUS316L | |||
| Quantity of sputtering cathodes | ≥1 sets,MF(medium frequency) unbalanced sputtering system, or rectangle or cylindrical sputtering cathodes | |||
| Pumping system | Turbo molecular pumps or diffusion pump+mechanical pump | |||
| Pumping Time | From atmosphere to 5.0*10-2Pa less than 8 minutes | |||
| Gas distribution System with Mass Flow Controllers | ≥2 sets | |||
| Ultimate Vacuum | 5.0*10-4 Pa | |||
| Working temperature | Room temperature | |||
| Working mode | Automatic or Manual mode, by 10.4(or 15) inches PLC touches screen | |||
| Total Power | 40-100kW | 70-1000kW | ||
| These units you can custom made | 1. Size of vacuum chamber | |||
| 2. Quantity of sputtering cathodes | ||||
| 3. Configurations of pumps | ||||
| 4. Gas distribution system | ||||
| Optional instruments | 1. Coatings thickness monitor | |||
| 2. Leakage detector | ||||
| 3. Arc ion deposition system(not for continuous model) | ||||
| 4. Evaporation system(not for continuous model) | ||||
PS: All the specifications can be customized according to your requests.
| Different colors made by MF magnetron sputtering |
You will need some necessary parts for daily production, we can also provide:
· Vacuum pumps
· DC sputtering cathode with power supplies
· Unbalanced sputtering cathode with power supplies
· O rings
· Vacuum meter with gauges/sensors
· Bias power supply
· Magnetic valves
· MFC
· Target materials
· Customized jigs
After the customer tested the machine and make sure the machine is no problem, we will take the machine apart. The solid packing can make sure you will receive a machine without any destroy.
In order to help you choose the best suitable PVD coating machine, please try to reply my questions below, thanks for your cooperation.
Q1: What is your product, and the max. dimension?
Q2: The size of your processing material, your desired daily production capacity?
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