Customization: | Available |
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After-sales Service: | Engineers Can Be Sent to The Worksite |
Warranty: | 1 Year |
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Magnetron Gun Circular Planar Target for PVD Vacuum Coating
Name | Magnetron Gun Circular Planar Target for PVD Vacuum Coating |
Type | Circular Magnetron Gun |
Application | For magnetron sputtering |
Size | Customized |
This sputtering coating unit can be used for PVD sputtering system.
Main Features:
Easy to install design.
High strength rare earth magnet module
Compatibility with DC, pulsed DC, MF operation.
High sputtering rate coupled with excellent target utilization
The sputtering material can be different metals, and silcon
Integrated argon gas inlet assembly.
Optimized turbulent water flow to provide uniform target cooling.
Low operating pressures.
Flexibility to accept target in 'clamp on' or 'bonded' configuration to cover broad range of thicknesses down to foils.
External or internal mounting optional.
UBM option available in all categories.
UHV compatible sources are also available
Integrated shutter assembly.
As a manufacturer of PVD coating systems, Hondson VAC responds to your wishes and supply you with a tailor-made system that meets your needs. To improve profitability, we build on our proven cylindrical standard recipients, but any other type of vacuum chamber is also possible. Contact us!