Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources

Product Details
Customization: Available
After-sales Service: Engineers Can Be Sent to The Worksite
Warranty: 1 Year
Gold Member Since 2024

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  • Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources
  • Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources
  • Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources
  • Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources
  • Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources
  • Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources
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Overview

Basic Info.

Type
Coating Production Line
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Weight (Kg)
1800
Dimension(L*W*H)
Customized Size
Key Selling Points
Multifunctional
Dimensions of Vacuum Chamber
Can Be Designed Following Customer′s Requirements
Voltage
Customers Local Voltage
Machinery Test Report
Provided
Coating Method
Arc Deposition
Video Outgoing-Inspection
Provided
Cathodic Arc Target
Company Size
After Warranty Service
Video Technical Support
Transport Package
Standard Export Packing
Specification
Customized
Trademark
Hondson VAC
Origin
Hunan, China
HS Code
8543300090
Production Capacity
50 Sets/Year

Product Description

Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources

[We provide technical consulting service and modification solution for old machines]

General Information


For Plasma Immersion Ion Implantation and Deposition System, it is mainly composed of double-wall process chamber, vacuum pumping system, 2 sets of filtered vacuum cathodic arc FCVA sources, 2 sets of Kaufman Ion Source KIS, RF-CCP plasma source, High Voltage Pulse Modulator HVPM, high voltage workpiece holder, gas line system, chamber temperature control, manual operating system and so on. 2 sets of FCVA sources can be used to generate metallic ions for either metal film or reactive deposition. The FCVA sources are able to do surface treatment with processing height >200mm. 2 sets of KIS sources can be used to do surface cleaning and sputtering with argon gas and the
cleaning height is >200mm RF-CCP plasma source can be used to generate gaseous plasma for either reactive deposition, plasma etching or plasma immersion ion implantation with HVPM.


1. Features

  •  Stainless Steel double wall chamber with water cooling
  •  Temperature control up to 350ºC
  •  High voltage workpiece holder with water tower cooling and rotation
  •  Filtered cathodic vacuum arc sources with full metallic plasma output
  •  Kaufman ion sources for sample cleaning
  •  RF-CCP source for gaseous plasma generation
  •  High voltage pulse modulator for sample bias


2. Main Specifications

  •  Stainless Steel chamber with double wall cooling: Φ650XH720mm
  •  KYKY turbopump (2000 L/s) and 18 L/s mechanical pump for pumping system, base pressure≤ 5X10-4 Pa, the rate of rise in pressure: ≤ 0.5Pa/h, adjustable pumping rate by throttle valve
  •  High voltage workpiece holder: special designed for plasma immersion ion implantation process with rotation and quartz glass shielding to avoid contamination
  • Temperature control system: 6 surrounding heater bars with power up to 5 kW, PID auto control chamber temperature up to 350°C
  • Gas feeding system: 5 mass flow controllers with isolated valves, separately feed into arc sources ion sources and main chamber
  • 2 sets of filtered cathodic vacuum arc sources
  • 2 sets of Kaufman ion sources
  • 1 set of RF-CCP plasma source with maximum output power of 1kW, 13.56MHz
  • 2 sets of shutter valves for FCVA sources
  • 2 sets of shutter valves for Kaufman ion sources
  • 1 viewport with Lead glass and shutter
Company Information

Xiangtan Hondson Coating Technology Co., Ltd. has enjoyed conspicuous success in the design, manufacture of PVD Vacuum Coating Machines. We are specialized in innovative PVD technology, as well as equipment for various applications, including electronics, thin film deposition, vacuum coated glass, automotive, plastic decorations, harden protective coatings on tools, molds, drills, knives, etc. Our high quality Vacuum Coaters are sold to foreign and domestic markets and win their praise and good graces. We are happy to establish business relationship with customers all over the world. If you are interested in our products, or you are looking for cooperation partners in China for Vacuum Coating Equipment, welcome to contact us for further information. Every machine is designed according to customer's real requests.
Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources

 

 

Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources

Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources

 

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