Customization: | Available |
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After-sales Service: | Engineers Can Be Sent to The Worksite |
Warranty: | 1 Year |
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Plasma Immersion Ion Implantation Machine with Filtered Cathodic Vacuum Arc Sources
[We provide technical consulting service and modification solution for old machines]
General Information
For Plasma Immersion Ion Implantation and Deposition System, it is mainly composed of double-wall process chamber, vacuum pumping system, 2 sets of filtered vacuum cathodic arc FCVA sources, 2 sets of Kaufman Ion Source KIS, RF-CCP plasma source, High Voltage Pulse Modulator HVPM, high voltage workpiece holder, gas line system, chamber temperature control, manual operating system and so on. 2 sets of FCVA sources can be used to generate metallic ions for either metal film or reactive deposition. The FCVA sources are able to do surface treatment with processing height >200mm. 2 sets of KIS sources can be used to do surface cleaning and sputtering with argon gas and the
cleaning height is >200mm RF-CCP plasma source can be used to generate gaseous plasma for either reactive deposition, plasma etching or plasma immersion ion implantation with HVPM.
1. Features
2. Main Specifications
Xiangtan Hondson Coating Technology Co., Ltd. has enjoyed conspicuous success in the design, manufacture of PVD Vacuum Coating Machines. We are specialized in innovative PVD technology, as well as equipment for various applications, including electronics, thin film deposition, vacuum coated glass, automotive, plastic decorations, harden protective coatings on tools, molds, drills, knives, etc. Our high quality Vacuum Coaters are sold to foreign and domestic markets and win their praise and good graces. We are happy to establish business relationship with customers all over the world. If you are interested in our products, or you are looking for cooperation partners in China for Vacuum Coating Equipment, welcome to contact us for further information. Every machine is designed according to customer's real requests.
Inquiry Guide:
The PVD coating machine can be used for different materials and industries. In order to recommend you the appropriate machine, we need your help on telling us:
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