Gas Mass flow controller (MFC) is a device for the accurate measurement and control of gas mass flow. Its working principle is based on the principle of fluid mechanics and heat transfer, the mass flow sensor measures the pressure difference and temperature change when the gas flows through the pipeline, and then calculates the mass flow of the gas, and regulates the gas flow through the control valve to keep it within the set range .
Working principle
The working principle of MFC mainly includes the following aspects:
sensor measurement : The mass flow rate is calculated by measuring the pressure difference and temperature change when the gas flows through the pipeline through the mass flow rate sensor.
control valve : according to the flow signal measured by the sensor, the opening of the valve is adjusted through the PID control circuit, and the flow through the channel is controlled in a closed loop to make it equal to the set flow .