Multi-Film Rate Thickness Monitor

• Customization: Available
• After-sales Service: on-Line Service
• Warranty: 12 Months
• Model NO.: SQM-160
• Material: High-speed Steel
• Measurement Object: Depth
• Range: 0~25mm
• Resolution: 0.01mm
• Precision: 0.001mm
• Measure Method: Automatic
• Accuracy: A
• Precision Measuring Device: Precision Measuring Device
• Certification: CE, ISO
• Customized: Non-Customized
• Weight: 2.7 Kg
• Communication Interface: Standard Configuration RS-232
• Measuring Clearance: 0.1 to 2.0 Seconds
• Number of Storage Films: 99
• Measurement Frequency Range: 6.5 to 1.0 MHz
• Transport Package: as Request
• Specification: standard
• Trademark: INFICON
• HS Code: 8543300090
• Production Capacity: 500 Sets/Month

Product Description

SQM-160 uses mature INFICON quartz crystal sensor technology to measure rate and thickness during thin film deposition. Two sensor inputs are standard inputs, and the other four sensor inputs are optional inputs. Two video recorders can provide analog rate and thickness signals.
Sensor inputs can be assigned to different materials, evenly distributed in large systems to achieve precise deposition control, or configured as dual sensors. The rate sampling mode can shield the sensor during high rate processes, thereby extending the lifespan of the sensor. The speed is displayed as 0.1A/s or 0.01A/s, and users can choose it themselves. In addition, frequency or quality display can also be selected. With four relay inputs, SQM-160 can control source or sensor shielding, signal time and thickness set points, and signal crystal failure. Digital input allows external signals to start/stop and reset readings.

function
√ Two standard measurement channels, with the other four optional
√ Analog output for easy recording of speed/thickness
√High resolution option: 0.03Hz, 10 readings per second
√RS-232 standard interface, can choose to connect to USB or Ethernet

Product images