Customization: | Available |
---|---|
After-sales Service: | Engineers Can Be Sent to The Worksite |
Warranty: | 1 Year |
Suppliers with verified business licenses
Audited by an independent third-party inspection agency
Mode
|
ARC series
|
Vacuum Chamber
|
SUS304. φBDDmm-1200×800-1200mm(H
|
Substrate Dome Size
|
Depends on thecustomers needs
|
Substrate Dome Rotation Speed
|
10 rpm to 50 rpm(Variable)
|
ArcEvaporation Source
|
From 2 to 16 sets
|
VacuumSystem
|
Roughing Pump,Diffusion Pumpsor Turbo Molecular Pump +Mechanical pumps
|
Ultimate Pressure
|
50×10-4Pa or lower
|
Pump Down Rate
|
25 minutes IAtm.to 50×10-3 pa)
|
Substrate Heater
|
550(max)
|
Layout Dimensions
|
5000mm 0W)×6500mm(D)×3500mm(H)approx
|
Power Requirements
|
3-phase,380V,50/60Hz,100-180kVA apprOx
|
Cooling Water Flow Rate
|
140/min.or greater
|
Compressed Air Pressure
|
0.5MPa orhigher
|
Gross Weight
|
8500kg approx
|