| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
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Cathodic Arc Deposition PVD Vacuum Sputter Installation
WORKING PRINCIPLE:
| Technical Spcifications |
| Mode | SA-800 | SA-1000 | SA-1200 | SA-1600 |
| Dimension | D700*H800mm | D1000*H1100mm | D1200*H1400mm | D1600*H2000m |
| Arc source quantity | 6 pcs | 12pcs | 14pcs | 24pcs |
| Sputtering | DC or MF sputtering | |||
| Sputtering | ≥1 set | |||
| Arc Power source | Arc power source, Pulsed bias power supply | |||
| Reactive gas control | Mass flowmeter + Electromagnetic valve | |||
| Vacuum chamber structure | Vertical chamber front opening door, double layer cooling chamber, SUS304 | |||
| Pumping system | Diffusion pump(Turbo Molecular pumps) +Roots pump +Mechanical pump | |||
| the ultimate vacuum can reach up to (5.0*10-4Pa) | ||||
| Heating Temperature control | Normal temperature to 150~500 centigrade PID control, radiation heating. | |||
| Vacuum degree measuring | Digital display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | |||
| Control mode | Manual/Automatic work mode by PLC touched screen | |||
| Compressed Air | 5 ~ 8Kgf/cm2 | |||
| Cooling Water | 2.5 ~ 3Kgf/cm2, 18 ~ 25°C, Distilled Water | |||
| Process Gas | 99.999% Pure Gas | |||
| Heating Control | Selecting the capacity according to the choice of user, PID control | |||
| System Ground | Class-1 grounding or its relevant facility | |||
| Remarks | All the specifications can be customized according to your requests. | |||
Complete Process:
In order to help you choose the best suitable PVD coating machine, please try to reply my questions below, thanks for your cooperation.
Q1: What is your product, and the max. dimension?
Q2: The size of your processing material, your desired daily production capacity?
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