| Customization: | Available |
|---|---|
| Type: | Negative Pressure Transmitter |
| Structure Type: | Capacitive Pressure Transmitter |
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The RBF-901 Load Lock Sensor (LLT), designed specifically for load lock environments, combines differential pressure and micro resistance vacuum sensor technology. Compared to traditional thermal conductivity meters, the combined output provides higher accuracy, stability, repeatability, and faster response time.
| model | RBF-901 | RBF-910 |
| type | Resistance, pressure resistance (differential pressure) | Resistance, piezoresistive (absolute pressure) |
| measuring range | 1x10-5~1.5x103 Torr | 1x10-5~1.5x103 Torr |
measurement accuracy |
Absolute pressure:5x10-4~1x10-3Torr: ±10% 1x10-3~1 Torr: ±5% 1 ~10Torr: ±10% 10~100Torr: ±5% 100 ~1500Torr: ±1% differential pressure:-10~10 Torr:±5%+±0.5Torr -100~-10 Torr:±0.8% -760~-100Torr:±1% 10~100Torr:±5% |
5x10-4~1x10-3Torr: ±10% 1x10-3~1 Torr: ±5% 10Torr~1000Torr:±0.75% |
repeatability |
Absolute pressure:1x10-4~1 Torr: ±2% 1~1000 Torr: ±1% differential pressure:-760~10Torr:±1% |
1x10-3~10 Torr: ±2% 10~800Torr:±0.2% |
| Supply Voltage | 9-30VDC | |
| power | <1.2W | |
| Display mode | LED status display | |
| Analog Output | 1-9VDC | |
| communication | RS232/RS485 | |
brief introduction |
The RBF-901 Load Locked Sensor (LLT), designed specifically for load locked environments, combines differential pressure resistance and micro resistance vacuum sensor technology. Compared with traditional thermal conductivity meters, the combined output provides higher accuracy, stability, repeatability, and faster response time. | The RBF-910 composite vacuum sensor provides vacuum measurements ranging from 1x10-5 to 1000 Torr, based on thermal conductivity and silicon film mechanical deformation. |
| application | Can be used for many different vacuum applications in the semiconductor, analytical, and coating industries. | |
| advantage | The combination of two sensor functions in one sensor is suitable for a wide measurement range. Fast, accurate, and reproducible pressure measurement reduces process cycle time. |
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